| 000 -LEADER |
|---|
| fixed length control field |
00877nam0a22001930a04500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
000061775 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20190422142059.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
s1999 xxu 000 0 eng d |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
2001062604 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.85 |
| Item number |
L484L |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Levinson, Harry J. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Lithography process control |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Bellingham, Wash. : |
| Name of publisher, distributor, etc. |
SPIE Optical Engineering Press, |
| Date of publication, distribution, etc. |
1999 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
190 |
| 650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
SEMICONDUCTORS |
| General subdivision |
ETCHING |
|
|---|
| Topical term or geographic name entry element |
MICROLITHOGRAPHY |
| General subdivision |
QUALITY CONTROL |
| 991 ## - |
|---|
| -- |
09 |
| -- |
02 |
| -- |
วิศวกรรมไฟฟ้า / อิเล็กทรอนิกส์ ระบบไมโครโปรเซสเซอร์ การออกแบบวงจรอิเล็กทรอนิกส์ ระบบไฟฟ้ากำลัง (Electrical Power Systems) วิศวกรรมส่องแสง |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
Books |