Introduction to VLSI process engineering (Record no. 166494)

000 -LEADER
fixed length control field 00648nam0a22002050a04500
001 - CONTROL NUMBER
control field 000087910
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20190422164646.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field s1993 enk 000 0 eng d
035 ## - SYSTEM CONTROL NUMBER
System control number 2001089267
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7874
Item number S63I
110 2# - MAIN ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element The Society of Chemical Engineers of Japan
245 10 - TITLE STATEMENT
Title Introduction to VLSI process engineering
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. London :
Name of publisher, distributor, etc. Chapman & Hall,
Date of publication, distribution, etc. 1993
300 ## - PHYSICAL DESCRIPTION
Extent 210
650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element INTEGRATED CIRCUITS
General subdivision VERY LARGE SCALE INTEGRATION
-- DESIGN
Topical term or geographic name entry element AND CONSTRUCTION
Topical term or geographic name entry element MANUFACTURING PROCESSES
991 ## -
-- 09
-- 01
-- วิศวกรรมเครื่องกล
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Permanent Location Current Location Shelving location Date acquired Full call number Barcode Date last seen Price effective from Koha item type
          Main Campus Main Campus Book Shelves 2019-04-22 TK7874 S63I 148006 2019-04-22 2019-04-22 Books


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