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Mems & microsystems : design and manufacture / Tai-Ran Hsu

By: Hsu, Tai-Ran.
Material type: materialTypeLabelBookPublisher: Boston, Mass. : McGraw-Hill, 2002Edition: International ed.Description: 436 p. : ill.ISBN: 0071204768.Call No.: TK7874 H78M 2002 Other title: Mems and microsystems : design and manufacture.Subject(s): MICROELECTRONICS | MICROELECTROMECHANICAL SYSTEMS | MICROELECTRONIC PACKAGINGBibliography, etc. Note: Includes bibliographical references and index
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Book Shelves 		TK7874 H78M 2002 (Browse shelf) Available 200512030037

Includes bibliographical references and index

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