Database needs for modeling and simulation of plasma processing [electronic resource] / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Contributor(s): National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Material type:
BookSeries: Compass series (Washington, D.C.): Publisher: Washington, D.C. : National Academy Press, 1996Description: 1 online resource.ISBN: 9780309055918; 9780585084541 (electronic bk.).Call No.:
TK7871.85
.D374 1996
Subject(s): Semiconductors -- Design and construction -- Congresses | Plasma engineering -- Databases -- Congresses | Plasma engineering -- Computer simulation -- CongressesOnline resources: Electronic Resources Bibliography, etc. Note: Includes bibliographical references.
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Includes bibliographical references.
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