TY  - BOOK
AU  - Levinson,Harry J.
TI  - Lithography process control
AV  - TK7871.85 L484L
PY  - 1999///
CY  - Bellingham, Wash.
PB  - SPIE Optical Engineering Press
KW  - SEMICONDUCTORS
KW  - ETCHING
KW  - MICROLITHOGRAPHY
KW  - QUALITY CONTROL
ER  -