Campbell, Stephen A. <br/><br/>
The science and engineering of microelectronic fabrication 

 - New York, N.Y. :  Oxford Univ. Press,  1996 
 - 536 
<br/><br/><label>Subjects--Topical Terms: </label><br/>SEMICONDUCTORS--DESIGN AND CONSTRUCTION
<br/><br/><label>LC Class. No.: </label>TK7871.85  / C356S