TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication
AV  - TK7871.85 C356S
PY  - 1996///
CY  - New York, N.Y.
PB  - Oxford Univ. Press
KW  - SEMICONDUCTORS
KW  - DESIGN AND CONSTRUCTION
ER  -