Introduction to VLSI process engineering 

 - London :  Chapman & Hall,  1993 
 - 210 
<br/><br/><label>Subjects--Topical Terms: </label><br/>INTEGRATED CIRCUITS--VERY LARGE SCALE INTEGRATION--DESIGN<br/>AND CONSTRUCTION<br/>MANUFACTURING PROCESSES
<br/><br/><label>LC Class. No.: </label>TK7874  / S63I