TY  - BOOK
AU  - Gupta,Dinesh C.
ED  - ASTM Committee F-1 on Electronics
ED  - Semiconductor Equipment and Materials Institute
ED  - Symposium on Semiconductor Processing
TI  - Semiconductor fabrication: technology and metrology 
T2  - STP
SN  - 0803112734
AV  - TK7871.85 S454
PY  - 1989///
CY  - Philadelphia, Pa.
PB  - ASTM
KW  - SEMICONDUCTORS
KW  - DESIGN AND CONSTRUCTION
KW  - CONGRESSES
N1  - Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute; "ASTM publication code number (PCN) 04-990000-46"; Includes bibliographies and indexes
ER  -