Hsu, Tai-Ran
Mems & microsystems : design and manufacture /
Mems and microsystems : design and manufacture
Tai-Ran Hsu
- International ed.
- Boston, Mass. : McGraw-Hill, 2002
- 436 p. : ill.
Includes bibliographical references and index
0071204768
MICROELECTRONICS
MICROELECTROMECHANICAL SYSTEMS
MICROELECTRONIC PACKAGING
TK7874 / H78M 2002