TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - Mems & microsystems: design and manufacture 
SN  - 0071204768
AV  - TK7874 H78M 2002
PY  - 2002///
CY  - Boston, Mass.
PB  - McGraw-Hill
KW  - MICROELECTRONICS
KW  - MICROELECTROMECHANICAL SYSTEMS
KW  - MICROELECTRONIC PACKAGING
N1  - Includes bibliographical references and index
ER  -