Database needs for modeling and simulation of plasma processing  [electronic resource] / 
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. 
 - Washington, D.C. :  National Academy Press,  1996. 
 - 1 online resource. 
 - The compass series .
 - Compass series (Washington, D.C.) .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>9780309055918 9780585084541 (electronic bk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses.<br/>Plasma engineering--Databases--Congresses.<br/>Plasma engineering--Computer simulation--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .D374 1996