Semiconductor fabrication : technology and metrology /
Dinesh C. Gupta, editor
- Philadelphia, Pa. : ASTM, 1989
- 476 p. : ill.
- STP ; 990 ASTM special technical publication ; 990 .
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute "ASTM publication code number (PCN) 04-990000-46"
Includes bibliographies and indexes
0803112734
SEMICONDUCTORS--DESIGN AND CONSTRUCTION--CONGRESSES
TK7871.85 / S454
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute "ASTM publication code number (PCN) 04-990000-46"
Includes bibliographies and indexes
0803112734
SEMICONDUCTORS--DESIGN AND CONSTRUCTION--CONGRESSES
TK7871.85 / S454