| 000 -LEADER |
|---|
| fixed length control field |
01688nam0a22003250a04500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
000126893 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20190530144814.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
s1989 xxu fnx000 000 0neng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0803112734 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
2004006001 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.85 |
| Item number |
S454 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Semiconductor fabrication : |
| Remainder of title |
technology and metrology / |
| Statement of responsibility, etc. |
Dinesh C. Gupta, editor |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Philadelphia, Pa. : |
| Name of publisher, distributor, etc. |
ASTM, |
| Date of publication, distribution, etc. |
1989 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
476 p. : |
| Other physical details |
ill. |
| 490 0# - SERIES STATEMENT |
|---|
| Series statement |
STP ; |
| Volume/sequential designation |
990 |
|
|---|
| Series statement |
ASTM special technical publication ; |
| Volume/sequential designation |
990 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute |
|
|---|
| General note |
"ASTM publication code number (PCN) 04-990000-46" |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographies and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
SEMICONDUCTORS |
| General subdivision |
DESIGN AND CONSTRUCTION |
| Form subdivision |
CONGRESSES |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Gupta, Dinesh C., |
| Relator term |
ed. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
ASTM Committee F-1 on Electronics |
|
|---|
| Corporate name or jurisdiction name as entry element |
Semiconductor Equipment and Materials Institute |
| 711 2# - ADDED ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
Symposium on Semiconductor Processing |
| Number of part/section/meeting |
(5th : |
| Date of meeting or treaty signing |
1988 : |
| Location of meeting |
Santa Clara, Calif.) |
| 949 ## - LOCAL PROCESSING INFORMATION (OCLC) |
|---|
| b |
200406150058 |
| p |
1050.00 |
| n |
BUR |
| r |
SID01 RONO20040311 ORDNO158 |
| t |
10 |
| c |
10 |
| l |
B |
| h |
TK7871.85 |
| j |
0 |
| i |
S454 |
|
|---|
| b |
200406150059 |
| p |
1050.00 |
| n |
BUK |
| r |
SID01 RONO20040311 ORDNO158 |
| t |
10 |
| c |
10 |
| l |
B |
| h |
TK7871.85 |
| j |
0 |
| i |
S454 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
A40064 |
| Link information for field corresponding to 9XX field |
Jun 25 2004 9:06AM |
| 991 ## - |
|---|
| -- |
09 |
| -- |
00 |
| -- |
คณะวิศวกรรมศาสตร์ (กราฟวิศวกรรม กลศาสตร์ พลศาสตร์ คณิตศาสตร์วิศวกรรม) |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
Books |