Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor
Contributor(s): Gupta, Dinesh C [ed.] | ASTM Committee F-1 on Electronics | Semiconductor Equipment and Materials Institute | Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.).
Material type:
BookSeries: STP ; 990; ASTM special technical publication ; 990.Publisher: Philadelphia, Pa. : ASTM, 1989Description: 476 p. : ill.ISBN: 0803112734.Call No.:
TK7871.85
S454
Subject(s): SEMICONDUCTORS -- DESIGN AND CONSTRUCTION -- CONGRESSESGeneral Note: Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute | "ASTM publication code number (PCN) 04-990000-46"Bibliography, etc. Note: Includes bibliographies and indexes
| Current location | Call number | Status | Date due | Barcode |
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| Main Campus Book Shelves | TK7871.85 S454 (Browse shelf) | Available | 200406150058 | |
| Main Campus Book Shelves | TK7871.85 S454 (Browse shelf) | Available | 200406150059 |
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Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
"ASTM publication code number (PCN) 04-990000-46"
Includes bibliographies and indexes
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